Abstract

Distributed reflector (DR) lasers consisting of a first-order vertical grating and second-order Bragg reflectors with λ/4 gaps were realized by one-step epitaxy followed by electron beam lithography and CH4/H2 reactive-ion etching. The sample with the cavity length of 460 µm, stripe width of 1.6 µm and grating depth of 0.1 µm on each lateral side exhibited a threshold current of 12 mA, a differential quantum efficiency of 18% from the cleaved front facet under pulsed condition and submode suppression ratio of 36 dB at a bias current of two times the threshold.

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