Distributed MEMS impedance matching network using a SW-DGS technique

Abstract

A novel distributed Micro-Electro-Mechanical-Systems (MEMS) impedance matching network is presented in this paper. This impedance matching network is based on DMTL (Distributed MEMS transmission line) having periodically loaded MEMS switches on a coplanar waveguide (CPW) transmission line. In order to miniaturize the physical size of the DMTL, a combination of a slow-wave (SW) structure and defect-ground-structure (DGS) is utilized. As a result, the distribution of the impedance coverage on the Smith chart can be improved for the limited physical length or reducing its size for a certain desired impedance distribution can be achieved. The parameter values of the equivalent circuit of the proposed structure are extracted from numerical simulation results using the FDTD simulator EMPIRE and are implemented for the calculation the uniformity factor to describe the uniformity of the impedance distribution on the Smith chart.