Abstract
Distributed Bragg reflectors (DBRs) were successfully fabricated with nanoporous TiO2 thin films using the surfactant-templated method. Nanoporous TiO2 thin films with various film refractive indices and thicknesses were spin-coated onto silicon substrates using titanium(IV) butoxide Ti(OC4H9)4 as the inorganic precursor, n-butanol as the solvent, and poly(ethylene oxide)–poly(propylene oxide)–poly(ethylene oxide) block copolymer EO20PO70EO20 as the templating agent, and were characterized using Fourier-transform infrared spectroscopy (FT-IR), capacitance–voltage (C–V) measurements, spectroscopic ellipsometry (SE), and transmission electron microscopy (TEM). We designed and fabricated DBRs using the nanoporous TiO2 thin films, whose refractive indices and thicknesses were controlled by varying the amounts of solute and solvent, respectively. The measured reflectance for the fabricated DBRs was over 96% at a center wavelength of ∼430 nm with a flat band of about 50 nm in the resonant region and typical interference patterns in the off-resonant region for a DBR with six pairs of TiO2 thin films.
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