Displacement measurement system for inverters using computer micro-vision

Abstract

We propose a practical system for noncontact displacement measurement of inverters using computer micro-vision at the sub-micron scale. The measuring method of the proposed system is based on a fast template matching algorithm with an optical microscopy. A laser interferometer measurement (LIM) system is built up for comparison. Experimental results demonstrate that the proposed system can achieve the same performance as the LIM system but shows a higher operability and stability. The measuring accuracy is 0.283μm.