Abstract

A sub-nanometer resolution displacement measuring method, basing on fringe phase shifting, is developed in this paper. The system mainly consists of a grating interferometer and a phase-shift device. The principle of interfere fringe phase-shifting is to move the photoelectric sensor between the two interference fringes. The method leads to higher resolution in theory than that with laser interferometer. Measuring and positioning experiments to verify the method are made and the’ results indicate that the new displacement measuring method will improve the positioning accuracy about 16%. The displacement measurement resolution with the new method will reach to sub-nanometre in theory.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.