Abstract
Abstract. This paper presents an improved modeling method for bridge-type mechanism by taking the input displacement loss into consideration, and establishes an amplification ratio model of bridge-type mechanism according to compliance matrix method and elastic beam theory. Moreover, the amplification ratio of the designed bridge-type nano-positioner is obtained by taking the guiding mechanism as the external load of bridge-type mechanism. Comparing with existing methods, the proposed model is more accurate, which is further verified by finite element analysis(FEA) and experimental test. The consistency of the results obtained from theoretical model, FEA and experimental testing indicates that the proposed model can accurately predict the amplification characteristics of nano-positioners, which helps the analysis and design of bridge-type nano-positioners in practical applications.
Highlights
With the rapid development of nano precision motion systems in the emerging field of precision engineering (Zhang et al, 2015; Hao, 2017; Liu et al, 2016), the design and analysis of nano-positioners received extensive attentions with successful applications in micro-assembly, bio-engineering, scanning probe microscopy, and precision optical inspection
Lobontiu and Garcia (Lobontiu and Garcia, 2003) derived the stiffness and displacement amplification model of the bridge-type mechanism based on the strain energy theory and the Cartesian second theorem, the results are too complicated for implementations
Ma et al (2006) considered the deformation of the hinge and derived the theoretical displacement amplification ratio of the bridge-type mechanism based on the kinematics theory and the virtual displacement theorem
Summary
With the rapid development of nano precision motion systems in the emerging field of precision engineering (Zhang et al, 2015; Hao, 2017; Liu et al, 2016), the design and analysis of nano-positioners received extensive attentions with successful applications in micro-assembly, bio-engineering, scanning probe microscopy, and precision optical inspection. Lobontiu and Garcia (Lobontiu and Garcia, 2003) derived the stiffness and displacement amplification model of the bridge-type mechanism based on the strain energy theory and the Cartesian second theorem, the results are too complicated for implementations. Ma et al (2006) considered the deformation of the hinge and derived the theoretical displacement amplification ratio of the bridge-type mechanism based on the kinematics theory and the virtual displacement theorem. Ye et al (2011) used the full symmetry of the bridge-type mechanism to establish a quarter model of the mechanism, and used the flexibility matrix method to derive the amplification ratio formula. A bridge-type mechanism based onedimensional nano-positioner is studied. Based on the compliance matrix and Euler beam theory, theoretical amplification models of the bridge-type mechanism and the nanopositioner are presented by considering the input displacement loss. Finite element analysis (FEA) and experiments are conducted to verify the proposed modeling method
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