Abstract
Abstract Atomic layer deposited polycrystalline Cr2O3 films grown from chromyl chloride and methanol were analysed using spectrophotometry, spectral ellipsometry and atomic force microscopy. The films possessed polycrystalline eskolaite structure with rough sublayer in contact with air. Using the positions and peak widths of the two visible absorption bands as fixed from absorption measurements, we could determine the optical dispersion of the film material in 1.3 – 6 eV energy region. A direct band gap of chromia film grown in these conditions was 3.2 eV, the other also direct absorption band with a gap of 5.15 eV was found situated in UV.
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