Dislocations in strained-layer epitaxy: theory, experiment, and applications

Abstract

In this review paper, we first present an historical perspective of theoretical work and some early experimental work in the field of dislocations in strained-layer epitaxy. Equilibrium strained-layer theory is presented in a didactic fashion. Attempts at kinetic modifications of equilibrium theory are also discussed. Quantitative and qualitative experimental observations are summarized in view of theory and current understanding. The more important potential applications of mismatched semiconductor epitaxy and the materials processing necessary to reach these goals are presented.