Abstract

Decorated dislocation lines in GaAs crystals are remarkably well observed by scattering of an infrared laser beam in the 1 μm wavelength range. Some of these dislocation lines are also observed by absorption imaging in the same wavelength region but others are only detected by light scattering. Furthermore, the former lines correspond to the pits etched by molten KOH. Dislocation lines in In-doped GaAs crystals grown by the LEC method from nearly stoichiometric melts are studied in connection with their growth history, where grown-in dislocation lines are bent at growth interfaces to react with each other and then their density is decreased. At the shoulder part of the ingots, many slip dislocations are found, where most dislocation lines are so isolated that they are clearly and individually observed by light scattering tomography without etching.

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