Abstract
Hydrophobic wafer bonding causes the formation of dislocation networks in the bonded interface. The structure of the dislocation network depends on the misorientation between both wafers during the bonding. The characterization of the dislocation networks proved that the luminescence depends only on the structure of the dislocation network. Different degrees of misorientation cause that different lines in the PL- and CL- spectra appear. This makes it possible to construct monochromatic light sources.
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