Abstract
Residual dislocations in a P-alloyed and an undoped GaAs crystal grown by the liquid encapsulated Czochralski method were investigated by transmission electron microscopy. In the undoped GaAs, dislocation bundles constructing cell walls and/or lineages consist of at least three different Burgers vectors. In the P-alloyed GaAs with low dislocation density, individual dislocation reactions were observed. Sessile dislocations were found to be formed by an interaction between two kinds of dislocations. The sessile dislocation formation may be a first step for the complicated dislocation structure in the undoped crystal.
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