Disk-shaped bulk micromachined gyroscope with vacuum sealing

Abstract

In this paper, we present the vacuum-sealed vibrating gyroscope using silicon bulk micromachining technology. The size of the device is 12×12×1.4 mm 3. Two glass substrates hold the silicon sensing part. The sensing part is encircled with the silicon frame which forms hermetic seal with the glass substrates. From the results of initial testing, we obtain an angular rate detection sensitivity of approximately 8.9 μV/(° s −1), a nonlinearity of 1.25% FS and a detection resolution of approximately 0.2° s −1 at 1 Hz BW. Additionally, we show the detection characteristics of the two orthogonal components of the applied angular rates simultaneously.