Abstract
A novel fabrication method for nanoscale tubular structures is presented in this paper. The tubular structures can be obtained by heating single-crystal silicon trenches or pillars formed by the inductively coupled plasma reactive-ion etching (ICP-RIE) Bosch process in hydrogen ambient. The importance of initial vacuum in the reaction chamber for tube formation and the tube formation mechanism were discussed. The components and sidewall size of the tubular structure were also studied to verify that the tube is made of the fluorocarbon (CF) passivation layer deposited by the Bosch process. The CF tubular structure would be a promising structure for BioMEMS.
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