Discharge regime of non-ambipolarity with a self-induced steady-state magnetic field in plasma sources with localized radio-frequency power deposition

Abstract

Involving the idea for the Biermann effect known from space physics as well as recent discussions on non-ambipolarity of the electron and ion fluxes in low-pressure discharges, the study builds the discharge pattern in a source with localized RF power deposition outside the region of high electron density. A vortex dc current flowing in an RF discharge and a steady-state magnetic field induced by this current govern the discharge behavior. Owing to a shift in the positions of the electron-density and plasma-potential maxima, the dc current is driven with the purpose of keeping the conservativity of the dc field in the discharge. The results present the spatial structure of a discharge in a regime of non-ambipolarity of the electron and ion fluxes, including its modifications by the magnetic field.