Abstract
The discharge impedance is calculated for a solenoidal inductively coupled plasma (ICP) discharge, which is one of the important sources for plasma processing. To calculate this impedance, the electromagnetic field quantities are obtained by solving the two-dimensional Maxwell equations in a realistic geometry. Also considered in the calculation is the anomalous skin effect which is regarded as a collisionless heating mechanism of ICP discharge. The results show that the discharge impedance is a function of various discharge parameters, such as plasma density, electron temperature, antenna position, collision frequency, excitation frequency, and chamber geometry.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
