Abstract
We present the experimental results and the theoretical analysis of the discharge impedance and the output performance of an UV preionized XeCl laser. During the breakdown the discharge impedance is time dependent and its value changes as the preionizator changes position. By fitting the experimental results to the results obtained by the equation of the discharge electrical circuit, it is possible to get exactly the electric element values which simulates the discharge impedance. These results are very important to design driving circuit devices which must have an output impedance very close to the laser discharge impedances in order to improve the impedance matching. Papers, which report laser behavior analysis, have utilized laser systems having a fixed preionizator position. In this work, we have found that the laser characteristics, in particular the laser discharge impedance and the output energy, changes as the preionization position changes.
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