Abstract
Abstract In this study, the possibility of the disappearance of Co particles on the surface of nanocrystalline diamond (NCD) films with large thicknesses was examined. It is shown that the number of Co particles decreased clearly with larger thicknesses. In the thickest case, the Co particles disappeared almost completely. Investigation with energy-dispersive spectroscopy for the cross section of the NCD films suggested that the Co particle was embedded during the growth of the NCD film. Our observations will contribute to depositing smooth NCD films on tools without the embrittlement of substrates by Co etching.
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