Abstract
This paper describes a type of thermal IC sensor able to measure the magnitude and direction of a fluid flow over the surface in which the sensor is embedded. The detection method is based on the measurement of flow-induced temperature differences on the IC, which is heated to a temperature above that of the fluid. By measuring a temperature difference in one direction, the flow along this direction can be detected, including the occurrence of flow reversal. When temperature differences are measured in two directions perpendicular to each other, a full 360° sensitivity can be obtained. The thermal operating principle and layout of the sensors are described, and calibration measurements are presented for air flow, indicating the sensor's accuracy to be about 1° in flow angle and 2% in flow velocity.
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