Abstract
In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creating openings around the confinement, changing the confinement geometry, or placing lithographic guiding patterns inside the confinement. Self-consistent field theory simulations show templating effect from the wall openings and reproduce the experimental results. We demonstrate scaling of a single binary state into a larger binary state array with individual binary state control.
Highlights
Block copolymer self-assembly in thin films can spontaneously generate periodic nanoscale patterns such as hexagonal arrays of dots or parallel lines, which have been proposed for applications such as nanoporous filtration membranes [1, 2], plasmonic structures [3, 4], integrated circuit fabrication [5,6,7], and magnetic storage media [8,9,10]
45 kg/mol PS-b-PDMS (SD45) block copolymer was spin coated onto the substrate to a thickness of 27 nm, solvent annealed in a vapor of toluene and heptane, and reactive-ion etched to reveal a pattern consisting of oxidized PDMS cylinders
We showed above that neighboring binary states are uncorrelated with each other in square confinements separated by walls
Summary
Block copolymer self-assembly in thin films can spontaneously generate periodic nanoscale patterns such as hexagonal arrays of dots or parallel lines, which have been proposed for applications such as nanoporous filtration membranes [1, 2], plasmonic structures [3, 4], integrated circuit fabrication [5,6,7], and magnetic storage media [8,9,10]. Concentric ring structures have been self-assembled inside symmetric confinements [20, 21], and we recently demonstrated nanoscale Archimedean spirals with specific chirality formed inside circular pits [28] By studying such block copolymer systems that have energetic degeneracy, graphoepitaxial pattern control inside two-dimensional templates can be better understood for lithography applications. By assigning different states or bits to the two degenerate morphologies, the resulting block copolymer patterns could act as a physical readonly memory
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