Abstract
The modification of a classical Twyman-Green interferometer by implementation of Liquid Crystal on a Silicon (LCoS) Spatial Light Modulator (SLM) as a reference mirror allows introducing an arbitrary phase in the reference wavefront. This special capability is applied to facilitate the measurements of mechanically active microelements (MEMS). Thanks to compensation of the initial shape of an element under test, it is possible to directly visualize vibration mode shapes even for non-flat objects and determine resonance frequencies of microelements. The description of the measurement system, methodology of the visualization and selected results obtained for a silicon micromembrane are presented. Full Text: PDF
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