Abstract
Contact resonance spectroscopy measurements on thin film deposits based on a tactile piezoresistive silicon microcantilever probe are described. Direct-reading capability during linescans across selectively thin-film-deposited areas of an artefact surface is demonstrated using a phase-locked-loop circuit (PLL). Good agreement found with frequency-sweep measurements followed by line-shape analysis (LSA) including non-linear damping confirm the high potential of the proposed method for non-destructive inline manufacturing-process metrology.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
