Abstract
ABSTRACTHigh speed microfabrication of quartz substrates by laser ablation using vacuum ultraviolet (VUV) laser beams is described. The VUV light is generated by anti-Stokes stimulated Raman scattering of fourth harmonics of Q-switched Nd:YAG laser. The well-defined patterns with a cross-sectional profile of rectangular shape are formed by using a contact mask. The role of short wavelength components of the VUV laser beams in the process is discussed.
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