Abstract
Thin films of amorphous Si3N4 (thickness 20nm) were irradiated with 120–720keV C60+,2+ ions and observed using transmission electron microscopy (TEM). The ion track produced in an amorphous material was directly observed by TEM. For quantitative analysis, the ion tracks were also observed using high-angle annular dark field scanning transmission electron microscopy (HAADF-STEM). The observed ion track consists of a low density core (radius ∼2.5nm) and a high density shell (width ∼2.5nm), which is very similar to the ion tracks in amorphous SiO2 irradiated with high energy heavy ions observed by small angle X-ray scattering (SAXS). Although the observed ion tracks may be affected by surface effects, the present result indicates that TEM and HAADF-STEM have potential to observe directly the fine structures of ion tracks in amorphous materials.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
