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Abstract
We report a simple direct route for the synthesis of high-quality semipolar (112¯2) AlGaN alloys across the composition range by metalorganic vapour phase epitaxy. We show that a single high-temperature growth step without the use of a low-temperature nucleation or buffer layer is a convenient way to grow high-quality (112¯2) AlGaN layers on m-plane sapphire substrate. We also report a detailed investigation of the microstructure and optical properties of these layers including phase-purity, surface morphology, epilayer tilt, and polarization-resolved optical transmission measurements.
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