Abstract
This paper describes the direct measurement and mapping of magnetic forces/fields with microscale spatial resolution by combining a commercial microforce sensing probe with a thin-film permanent micromagnet. The main motivation of this work is to fill a critical metrology gap with a technology for direct measurement of magnetic forces from nN to 10’s of mN with sub-millimeter spatial resolution. This capability is ideal for measuring forces (which are linked to magnetic field gradients) produced by small-scale magnetic and electromagnetic devices including sensors, actuators, MEMS, micromotors, microfluidics, biomedical devices. This new measuring technique is validated by comparison of measured forces from small permanent magnets with the analytical models.
Highlights
Ongoing technological advancements in microscale devices motivate the need for magnetic force metrology at small spatial scales
Atomic force microscopy (AFM) provides force sensing capability with sub-micron spatial resolution[1] and two variants of scanning probe microscopy are capable of measuring forces produced by magnetic fields: magnetic force microscopy (MFM)[2,3,4,5,6,7,8,9,10,11] and magnetic resonance force microscopy (MRFM).[12]
Non-contact magnetic force sensing at the microscale has not been widely explored, but rather forces are inferred from magnetic field measurement methods using Hall probe[20] or magneto-optical imaging (MOI)[21] techniques
Summary
Ongoing technological advancements in microscale devices motivate the need for magnetic force metrology at small spatial scales. Atomic force microscopy (AFM) provides force sensing capability with sub-micron spatial resolution[1] and two variants of scanning probe microscopy are capable of measuring forces produced by magnetic fields: magnetic force microscopy (MFM)[2,3,4,5,6,7,8,9,10,11] and magnetic resonance force microscopy (MRFM).[12] While these techniques are well suited for measuring forces at the micrometer and nanometer length scales, they are generally limited to forces on the order of ∼1 nN or smaller.[13]. This work reports the combination of a microforce capacitive sensing probe (FemtoTools FT-S1000)[19] with a microfabricated permanent magnet as a sensing probe yielding uniaxial magnetic force mapping capabilities at any point in space, with microscale spatial resolution and nanometer positional accuracy. To validate the construction of the proposed magnetic force sensing technique, an analytical model of the force between two magnets was implemented and compared with experimental measurements
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