Abstract
Abstract High quality lanthanum-modified lead zirconate titanate (PLZT) films have been deposited on (111)Pt/Ti/SiO 2 /Si substrates by direct liquid injection (DLI) metal-organic chemical vapor deposition (MOCVD). The as-deposited PLZT films have smooth, reflective surfaces which were characterized by scanning electron microscopy and variable angle spectroscopic ellipsometry. X-ray diffraction (XRD) measurements indicated that single perovskite phase with a -axis oriented PLZT films were formed in situ at a substrate temperature of 650 °C. Typical P-E hysteresis loop exhibits remanent polarization as high as 2 P r = 48.1 μC / cm 2 . The coercive field is 2 E c = 98 kV / cm . Electrical fatigue tests show 70% of the original switched polarization remained after 1 × 10 10 cycles.
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