Abstract
Investigations on the laser-induced reduction of indium tin oxide (ITO) are presented. Here, the oxygen content of the material is locally decreased by CW YAG:Nd laser irradiation in hydrogen atmosphere. The dependences of resistance of metallized stripes versus laser beam power and beam scanning velocity are shown. Electrical conductivity of laser-written stripes was estimated 2–3 orders higher with respect to raw ITO film conductivity.
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