Abstract
The Fluorine laser microstructuring technique enables the direct laser fabrication of cylindrical lenses and lens arrays thereof in wide band gap materials. For the mask projection technique, a special mask geometry was calculated, which allows the fabrication of cylindrical lenses with a nearly optimum curved surface. Based on our results of processing fused silica and borosilicate glass, we investigated the possibility to apply these microstructuring technique to wide band gap materials like calcium fluoride. The radius of curvature (ROC) can be adjusted by the process parameters laser pulse fluence and pulse-to-pulse overlap in a range of 130 to 450 µm micrometer. A minimal surface roughness of 100 nm RMS can be reached.
Highlights
Micro optics are becoming more and more important to deal with technical problems
Based on our research on the microstructuring of blaze gratings [3], diffractive optical elements (DOEs) [4], and Fresnel lenses [5] we further developed these technique for the fabrication of cylindrical lenses with a nearly optimal shaped lens surface and a defined radius of curvature (ROC)
The fabrication of cylindrical lenses requires the knowledge of the specific material parameters ablation threshold Hth and absorption coefficient α
Summary
Micro optics are becoming more and more important to deal with technical problems. A wide range of techniques were developed to manufacture optical elements in the micrometer range in the last few years and in particular for the fabrication of cylindrical lenses and lens arrays [1, 2]. A wide range of techniques were developed to manufacture optical elements in the micrometer range in the last few years and in particular for the fabrication of cylindrical lenses and lens arrays [1, 2]. This technique enables the direct laser fabrication of micro lenses in glass and especially in wide band gap materials like calcium fluoride.
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