Abstract
We have fabricated direct-injection high-Tc superconducting quantum interference devices (SQUIDs) with integrated YBa2Cu3O7−x (YBCO) ground planes in the upper part of structure. The YBCO/PrBa2Cu3O7−x(PBCO)/YBCO edge junctions with 10-nm-thick PBCO barriers showed RSJ-like current-voltage (I–V) characteristics before and after the ground plane formation. We measured the voltage modulations of these SQUIDs with two different hole sizes to evaluate the line inductance. At a temperature of 30 K, the estimated line inductance under the ground plane was about 1.0 pH/□, while the estimated line inductance without the ground plane was 2.8 pH/□.
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