Abstract
Multilayered nanocrystalline graphitic carbon films were directly formed on BaF2 substrates by the alcohol chemical vapor deposition method using ethanol. Domain size was typically 46 nm as estimated from the peak intensity ratios of G- and D-band of the Raman spectra, which were higher than currently reported values for various dielectric substrates. Sheet resistance measured by the four-probe method was 900 Ω/sq. A possible formation mechanism of the graphitic carbon layer was discussed referring to the results of X-ray photoelectron spectroscopy (XPS) and energy dispersive X-ray spectroscopy (EDX) for a composition analysis. It was found that the graphitic carbon layers were formed on the BaO surface, which was produced by the oxidization of the BaF2 substrate by the ethanol source.
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