Abstract
A dozen-micron-scale 4-7 layers of graphene was synthesized directly on Lithium Niobate (LiNbO3, LN) by carbon implantation in nickel covered LiNbO3 film. The 1.52E16 ions·cm-2 carbon ions of 80KeV were implanted to the nickel film with the implantation depth of 100nm, which is close to the interface between the nickel film and LiNbO3. The implanted carbon atoms dissolved in nickel at an elevated temperature and diffused towards to the interface between nickel film and LiNbO3 during annealing. After the nickel film fell off, the graphene material was found by Raman spectroscopy and confirmed by the Atomic Force Microscope (AFM) topographic image. Implantation combined with patterned metal film suggests the possibility to engineer two-dimensional graphene with special confinement. It also provides a valuable and novel way for integrating graphene-wafer structure for other available substrate wafer in microelectronics and photonics devices.
Highlights
Graphene has received increasing attention since the successful preparation of it in 2004 (Novoselov et al, 2004)
It was found that both samples had similar wrinkles. This shows that the occurrence of wrinkles on the surface of this sample depends on the surface nickel film and the LN substrate themselves, and has nothing to do with carbon ion implantation
The 1.52E16 ions·cm−2 carbon ions of 80 keV were implanted to the nickel/LN substrate, which consists of an LN crystal covered with a layer of 134 nm thick nickel metal film
Summary
Graphene has received increasing attention since the successful preparation of it in 2004 (Novoselov et al, 2004). Single-layer graphene is a two-dimensional honeycomb lattice structure composed of a single layer of carbon atoms, and each carbon atom is bonded to the surrounding carbon atoms through SP2 hybridization (Xu et al, 2013). Graphene has excellent thermal conductivity (up to 5500 W (m−1k−1)) and high specific surface area (up to 2630 m2g−1) (Wang et al, 2017) Due to this special structure, outstanding thermal conductivity and mechanical properties, graphene has aroused great interest from the scientific community in recent years (Geim and Novoselov, 2007; Geim, 2009; Ma et al, 2018; Martín-García et al, 2018), and is expected to trigger a revolution in the field of modern optoelectronic technology
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