Abstract
A novel method for single-step, lithography-free, and large-scale laser writing of arrays of metallic (Au) and semiconductor (Si) nanoparticles (nanoresonators) has been developed. Changing energy of femtosecond laser pulses and film thickness it is possible to vary diameter of the nanoparticles, while the distance between them can be varied by laser scanning parameters. This method has an advantage over the most previously demonstrated methods in its simplicity and versatility, while the quality of the structures is good enough for many applications.
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