Abstract
A micro-thermal analyzer, used for scanning probe microscopy, was applied to visualize the thermal conductance distribution in silicon nitrides. In the scanning thermal microscopy mode, it was confirmed that thermal conductivity is low at grain boundaries and high in the silicon nitride grains. Localized thermal analysis revealed that the thermal response from grains larger than approximately 5 μm gives valid information, independent of the individual grains. The response from smaller grains, however, exhibits grain size dependence. It is thought that the thermal response from small grains is influenced by the presence of grain boundaries near the probe.
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