Abstract
Recent advanced in electron sources and optics for Transmission Electron Microscopy (TEM) have revealed severe shortcomings in electron detection. Current detection systems are based on a phosphor-coupled charge-coupled-device approach, which suffers from a number of severe limitations that include weak Modulation Transfer Function (MTF) and poor Detective Quantum Efficiency (DQE). As these limitations are intrinsic to indirect sensor technology attention is now turning towards the use of novel sensor technologies based on direct electron detection [1,2]. The present work reports on Monte Carlo simulations of electron-sensor interaction to explore the improvements brought to MTF and DQE by this new generation of detectors. Attention is centered on a model detector structure and 200keVelectrons.
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