Abstract
Electro-optic polymer waveguides in electron beam sensitive polymethyl methacrylate (PMMA) polymer matrix doped with organic nonlinear chromophores could be directly patterned by electron beam exposure with high resolution and smoothness. The polymer in the exposed regions was removed with standard electron beam resist developer and without damaging the chromophore containing polymer waveguides. Feature sizes on the order of 100 nm could be clearly resolved. High quality microring resonators made of YL124/PMMA electro-optic polymer were successfully fabricated with this technique. The measured resonance extinction ratios were more than 16 dB and quality factors were in the range of 10(3) approximately 10(4).
Highlights
Multi-functionality and compactness of micro-ring resonators make them promising building blocks for high density photonic integration
Electro-optic polymer waveguides in electron beam sensitive polymethyl methacrylate (PMMA) polymer matrix doped with organic nonlinear chromophores could be directly patterned by electron beam exposure with high resolution and smoothness
High quality microring resonators made of YL124/PMMA electro-optic polymer were successfully fabricated with this technique
Summary
Multi-functionality and compactness of micro-ring resonators make them promising building blocks for high density photonic integration. Based on a systematic analysis and simulation of typical polymer microring resonators [12], fabrication of the submicron coupling gap with a precision
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