Abstract
A palladium-nanoparticle/acrylic-polymer hybrid negative pattern was formed on a flexible film by photolithography and then converted to a copper pattern by electroless plating. The negative pattern of the hybrid was formed by UV-irradiation of the resist film, which contained acrylate monomer, palladium salt, and a photo-radical initiator. The photochemically generated radicals induced the radical polymerization of the acrylate and also reduced the palladium ion to form palladium nanoparticles. A copper film was deposited on the surface of the hybrid pattern by electroless plating, where the palladium nanoparticles work as a catalyst.
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