Abstract
A direct display plasma density and temperature meter is developed by using a Langmuir probe. A small AC voltage is superposed on the DC voltage and the 2nd harmonic component of AC current is detected. The phase reversal of the 2nd harmonic component is observed at the inflection point of langmuir characteristic, and an experiment is carried out to fix the DC voltage automatically at this voltage detecting the phase reversal of the 2nd harmonic component. The plasma density and electron temperature are obtained directly, by using simple operational circuits, from the DC current and the fundamental component of the AC current at the inflection voltage.
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