Abstract
Abstract : A system for the quantification of secondary ion mass spectrometric images produced by an ion microscope is presented. The Microscopic Image Digital Acquisition System (MIDAS) developed in this laboratory by coupling a CAMECA IMS-300 ion microscope, a low light level TV camera, a video color graphics system and digital image processing techniques, is described. Ion images detected by the television camera are converted in real time into matrices of point intensities, maintaining the spatial resolution of the original image. These image matrices may then be converted to ion intensity space, or by the use of standards, to concentration. The use of ion implantation to fabricate image standards is presented as an evaluation of MIDAS. Applications of color display as a means of conveying compositional morphological information are demonstrated. (Author)
Published Version
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