Abstract
Copper (Cu) film bonded with polymer substrates offers better dimensional stability than that of deposited Cu especially in humid environment. However, poor adhesion is an issue in both cases. In this paper, we demonstrate a two-step, low temperature direct bonding technique for liquid crystal polymer (LCP) and copper (Cu) using oxygen plasma. The bonded interface showed high peel strength. This strong adhesion is due to the interdiffusion of Cu and carbon atoms into LCP and Cu film respectively. These phenomena resulted in three-dimensional metal clusters of Cu atoms and islands at the LCP/Cu interface, which gradually diffuse into the LCP. Interfacial elemental analysis reveals an intermediate oxide layer formation due to Cu2O and CO.
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