Dimensional Synthesis of a Planar Parallel Mechanism for Wafer Transfer with Kinematics Performance

Abstract

This paper deals with the dimensional synthesis of a planar parallel mechanism for wafer transfer with kinematics performance. Under the relationship between workspace and parametric, a kinematics performance index, which is composed of the conditioning number of the Jacobian matrix and the motion resolution, is considered as the evaluation criterion. And a new index which is proposed by considering both the mean value and fluctuation of the pre-mentioned index is used to optimally design the dimensional parameters. It is testified that the optimal dimensional parameters can satisfied with the kinematics performance.