Abstract
We present epitaxial growth of GaInNAs on GaAs by molecular beam epitaxy (MBE) using analog, digital and N irradiation methods. It is possible to realize GaInNAs quantum wells (QWs) with a maximum substitutional N concentration up to 6% and a strong light emission up to 1.71μm at 300K. High quality 1.3μm GaInNAs multiple QW edge emitting laser diodes have been demonstrated. The threshold current density (for a cavity of 100×1000μm2) is 300, 300, 400 and 940A/cm2 for single, double, triple and quadruple QW lasers, respectively. The maximum 3dB bandwidth reaches 17GHz and high-speed transmission at 10Gb/s up to 110°C under a constant voltage has been demonstrated.
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