Abstract
Spatially resolved microchemical analysis of thin specimens by STEM-EDX can with advantage be performed using a series of quantitative analyses at a number of selected discrete points in a digitally controlled array.The conventional line traces in X-ray peak intensity are not necessarily a good indication of elemental distributions. Substantial errors can occur as a result of the need for spectrum processing, X-ray corrections and in the case of thin specimens due to variations in specimen thickness which may be associated with differential polishing of regions of different chemical composition during sample preparation. In some circumstances ratio line scanning1 may be an improvement.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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