Abstract
This chapter presents the design and implementation of an input–output-based digital sliding-mode control (IODSMC) algorithm to suppress the nonlinearity and disturbance in piezoelectric micro-/nano-positioning systems. It is applicable to precision motion tracking of a class of micro-/naon-positioning systems, which can be described by a high-order linear model preceded by disturbances. The stability of the control system is proved and its effectiveness is validated through experimental investigations on a piezo-driven micropositioning system.
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