Abstract

Capabilities of spectroscopic ion beam analysis (IBA) techniques that are available in ion microprobe facilities can be greatly improved by the use of digital pulse processing. We report here development of a digital multi parameter data acquisition system suitable for IBA imaging applications. Input signals from charge sensitive preamplifier are conditioned by using a simple circuit and digitized with fast ADCs. The digitally converted signals are processed in real time using FPGA. Implementation of several components of the system is presented.

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