Abstract
A comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.
Highlights
IntroductionThe concept of the fourth industrial revolution (Industry 4.0) provides end-to-end digitization of all physical processes and their integration into the digital ecosystem
The concept of the fourth industrial revolution (Industry 4.0) provides end-to-end digitization of all physical processes and their integration into the digital ecosystem. It corresponds to new digital technologies, the typical examples of which can be considered the Internet of things (IoT) and its industrial variety - the Industrial Internet of things (IIoT)
IoT (Fig. 1) refers to a wide variety of devices, sensors, actuators, which are networked through communication channels
Summary
The concept of the fourth industrial revolution (Industry 4.0) provides end-to-end digitization of all physical processes and their integration into the digital ecosystem. It corresponds to new digital technologies, the typical examples of which can be considered the Internet of things (IoT) and its industrial variety - the Industrial Internet of things (IIoT). IoT (Fig. 1) refers to a wide variety of devices, sensors, actuators, which are networked through communication channels. Microelectromechanical systems (MEMS) are sensors and actuators which are made primarily on silicon wafers using group processing technologies adopted from the microelectronics technology (Fig. 2). The fabrication of MEMS in mass production is possible due to the process and equipment similarities with integrated circuits technologies. One of the most important features of MEMS is that their critical dimensions are greater than 1 μm (Fig. 4), which makes it possible to use the relatively cheap contact lithography technology as opposed to the projection photolithography used in microelectronics technology
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