Diffusionless oxidation and structure modification of thin Cr films by the action of ultrashort laser pulses

Abstract

Results of impact on Cr thin metal films by ultrashort laser pulses are investigated in the paper. For the first time thermochemical action of such pulses is shown and confirmed by analytical approaches (micro-Raman spectroscopy, CAES and others) and selective chemical etching both. It is impossible to ascribe this effect to well-known mechanism of heterogeneous diffusion at the irradiation specified conditions. Possible reasons of Cr thin films diffusionless oxidation and structure modification are observed. Discovered phenomena open up new opportunities for developing of optical thermochemical data recording on Cr thin films, which are widely used in microelectronics as photomasks and in the process of diffractive optical elements manufacturing.