Diffusion and desorption ofSiH3on hydrogenatedH:Si(100)−(2×1)from first principles

Abstract

We have studied diffusion pathways of a silyl radical adsorbed on the hydrogenated $\mathrm{Si}\phantom{\rule{0.3em}{0ex}}(100)\text{\ensuremath{-}}(2\ifmmode\times\else\texttimes\fi{}1)$ surface by density-functional theory. The process is of interest for the growth of crystalline silicon by plasma-enhanced chemical vapor deposition. Preliminary searches for migration mechanisms have been performed using metadynamics simulations. Local minima and transition states have been further refined by using the nudged-elastic-band method. Barriers for diffusion from plausible adsorption sites as low as $0.2\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$ have been found, but trap states have also been spotted, leading to a more stable configuration, with escape barriers of $0.7\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$. Diffusion among weakly bound physisorbed states is also possible with very low activation barriers $(l50\phantom{\rule{0.3em}{0ex}}\mathrm{meV})$. However, desorption mechanisms (either as $\mathrm{Si}{\mathrm{H}}_{3}$ or as $\mathrm{Si}{\mathrm{H}}_{4}$) from physisorbed or more strongly bound adsorption configurations turn out to have activation energies similar to diffusion barriers. Kinetic Monte Carlo simulations based on ab initio activation energies show that the silyl radical diffuses at most by a few lattice spacing before desorbing at temperatures in the range $300--1000\phantom{\rule{0.3em}{0ex}}\mathrm{K}$.