Abstract
Diffuse elastic scattering of electrons by single nanometer-sized defects in ion irradiated Au has been measured quantitatively. Diffuse scattering from isolated single dislocation loops is separated from Bragg scattering at a weakly excited diffraction peak. Results are compared with calculations for diffuse scattering of X-rays and electrons. The pattern in the diffuse scattering within a single reciprocal lattice plane often reveals the loop geometry, size, and interstitial or vacancy nature. Defect images using only diffuse scattering are achieved with high sensitivity and good resolution by a hollow-cone dark-field method.
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