Abstract
The acceptance angle of the detector of a double axis diffractometer is designed such that all of the diffracted beam is recorded for a rocking curve. When this acceptance angle is reduced, as in the triple axis diffractometer, two dimensional diffraction data can be recorded. In the resulting diffraction space maps each diffraction feature has a shape and a position from which the unit cell dimensions of a heteroepitaxial layer can be derived as well as information about relative tilts, curvature, lattice parameter variations and defect densities. Applications of diffraction space mapping using high and low resolution optics are discussed. 25 refs., 13 figs., 2 tabs.
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