Abstract

A new considerably improved master oscillator–power amplifier copper bromide vapor system delivering diffraction-limited high-power laser radiation at the atomic copper 510.6- and 578.2-nm lines is developed and investigated. The highest beam quality achieved so far with laser systems oscillating on the metal self-terminating transitions is confirmed by two independent methods. Precise micromachining is realized on silica, ceramics, silicon, and stainless steel. Though the aspect ratio of the crater drilled in optical grade fused quartz through the wave-guide-assisted method is higher than the one obtained so to date, a new method is also developed to make the aspect ratio almost limitless.

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